PlasmaGuard (SMPA)	SMPA-1-2/45-X^2	SMPA-11-2/45-X	SMPA-5-2/65-X	SMPA-7-2/65-X	SMPA-5-2/100-X	SMPA-1-4/300-X
Micropole Analyzer (MPA)	MPA6-1-2/45-X	MPA6-11-2/45-X	MPA6-5-2/65-X	MPA6-7-2/65-X	MPA6-5-2/100-X	MPA6-1-4/300-X
Spectra Converter (SC)	SC6-18	SC6-18	SC6-14	SC6-14	SC6-11	SC6-07
Mass Range (amu)	2-45	2-45	2-65	2-65	2-100	4-300
Resolution FWHM (amu)	0.5	1.5	0.8	0.9	1	1.5
Max. Operating Pressure (Torr) 1	1x10^-3	1.1x10^-2	5x10^-3	7x10^-3	5x10^-3	1x10^-3
Min. Detectable Partial Pressure*(Torr) for 25 ms FC Dwell Time	10^-10	10^-10	10^-10	10^-10	10^-10	10^-10
Fastest Scan Updates / amu (s)	0.6	0.6	0.6	0.6	0.6	0.6
Min. Detectable Leak (sccs)	2x10^-8	2x10^-8	2x10^-8	2x10^-7	2x10^-8	2x10^-8

(1) Upper pressure limits and limits of detection are all specified for nitrogen
(2) X specifies the vacuum flange type: C for 1.33” Conflat and K for NW/KF16

Total Process Monitoring and Control Solution

•SMPA-5-2/65C: PlasmaGuard (5 mTorr Upper Pressure limit, 2-65 Amu vxvcxviiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiiixmass range, mounted on mini Conflat Flange) •SC6-14: 14 MHz Spectra Converter •CNL-06: Computer Logic Interface •PS-03: 24 VDC Power Supply •CA-06-XX: SMPA Shielded Cable •CA-02-XX: RS232 Cable •Control Software (WinMPA2002) •VG-1A (1 Torr CDG; See TRIO Brochure) •V12: Optional Pneumatic valve Contact Sales Office for Prices XX: Cable Length = 6, 10, 15’ YY: Cable Length = 6, 10’

Shipping Information: Weight ………………………………...………….... 5 kg Approx. Packaging Dimensions ……………………………… 450x400x100 mm

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