MMSDS
The Mobile Modular Selector Detection System (MMSDS) is a turnkey gas sampling system. It includes a dry vacuum pumping system, a computerized sample injection system, and the Symphony Micropole Mass Spectrometer.
MULTI-SYSTEM-ACCESSORY
Micropole Docking Station for up to 5 Sensors (PAC-05): multi-chamber solution where power supplies, driving electronics, and wires are enclosed in a single platform.
QUARTET
The Micropole Quartet system is a turnkey mass spectrometer system. Using the Quartet, the user is able to acquire absolute gas analysis in a fast and easy manner.
SYMPHONY
Symphony is the world’s smallest complete mass spectrometer system. The small size, low cost, and component interchangeability provide the user with a set of powerful features and unique advantages.
TRIO
Miniature Low Cost All Metal Capacitance Diaphragm
Gauges for Reliable Pressure Measurements from Atmosphere to High Vacuum.
Ferran Scientific designs
and manufactures vacuum technology instruments for gas measurement, control
and analysis. The product offerings include miniature mass spectrometers,
high pressure Residual Gas Analyzers (RGAs), and pressure transducers. These sensor type instruments are
based on patented technologie --Micropole™
quadrupole sensor array.
Combined with patented low cost manufacturing techniques, Ferran Scientific
Inc. is able to offer a line of small footprint superior scientific products
at reduced prices.
Since the Micropole mass spectrometer is
capable of operating at higher pressures (several mTorr) and therefore
does not require additional vacuum pumps it provides a low cost of ownership.
As an integral part of the tool, the Micropole qualifies tools for process
and provides real time control of vacuum processes. By increasing tool
uptime and reducing scrap products, the Micropole helps improve productivity
in manufacturing facilities. Typical applications
of the Micropole mass spectrometers as a RGA include: . Semiconductor
Wafer Fabrication . Physical Vapor Deposition . Magnetic/Optical Storage
Media . Industrial Vacuum Processes . Vacuum Research and Development
. Glass/Optical Coating . Particle Accelerators
Contact the factory for additional equipment
such as reducing adapters and special fittings.
